Imec, kafukufuku waku Belgian komanso ukadaulo watsopano, yapereka zida zoyambira za GaAs-based heterojunction bipolar transistor (HBT) pa 300mm Si, ndi zida za CMOS-zogwirizana ndi GaN pa 200mm Si pakugwiritsa ntchito ma wave wave.
Zotsatira zikuwonetsa kuthekera kwa III-V-on-Si ndi GaN-on-Si monga matekinoloje ogwirizana ndi CMOS othandizira ma module akutsogolo a RF kupitilira ntchito za 5G.Adakambidwa pamsonkhano wa IEDM wachaka chatha (Dec 2019, San Francisco) ndipo adzawonetsedwa munkhani yayikulu ya Imec's Michael Peeters yokhudza kulumikizana kwa ogula kupitilira Broadband ku IEEE CCNC (10-13 Jan 2020, Las Vegas).
Mukulankhulana opanda zingwe, ndi 5G ngati m'badwo wotsatira, pali kukankhira kumayendedwe apamwamba kwambiri, kusuntha kuchokera kumagulu odzaza a sub-6GHz kupita ku ma mm-wave band (ndi kupitirira).Kuyambitsidwa kwa magulu awa a mm-wave kumakhudza kwambiri zida zonse za 5G network ndi zida zam'manja.Kwa mautumiki am'manja ndi Fixed Wireless Access (FWA), izi zimamasulira kukhala ma module akutsogolo ovuta kwambiri omwe amatumiza chizindikiro kupita ndi kuchokera ku antenna.
Kuti azitha kugwira ntchito pafupipafupi pa mm-wave frequency, ma module akutsogolo a RF ayenera kuphatikiza kuthamanga kwambiri (kupangitsa kuti ma data a 10Gbps ndi kupitilira apo) akhale ndi mphamvu zotulutsa zambiri.Kuphatikiza apo, kukhazikitsidwa kwawo m'ma foni am'manja kumapangitsa kuti pakhale zofunikira kwambiri pa mawonekedwe awo komanso mphamvu zamagetsi.Kupitilira 5G, zofunikirazi sizingakwaniritsidwenso ndi ma module apamwamba kwambiri a RF akutsogolo omwe nthawi zambiri amadalira matekinoloje osiyanasiyana pakati pa ena ma HBT opangidwa ndi GaAs a amplifiers - okulitsidwa pamagawo ang'onoang'ono komanso okwera mtengo a GaAs.
"Kuti athe kupititsa patsogolo ma module akutsogolo a RF kupitilira 5G, Imec imayang'ana ukadaulo wogwirizana ndi CMOS wa III-V-on-Si", akutero Nadine Collaert, director director ku Imec."Imec ikuyang'ana kuphatikizika kwa zida zakutsogolo (monga zokulitsa mphamvu ndi ma switch) ndi mabwalo ena ozikidwa pa CMOS (monga ma control circuitry kapena transceiver technology), kuti achepetse mtengo ndi mawonekedwe, ndikupangitsa ma hybrid circuit topologies. kuthana ndi magwiridwe antchito ndi magwiridwe antchito.Imec ikuyang'ana njira ziwiri zosiyana: (1) InP pa Si, ikuyang'ana ma-mm-wave ndi ma frequency pamwamba pa 100GHz (mapulogalamu amtsogolo a 6G) ndi (2) zida za GaN pa Si, zomwe zimayang'ana (mu gawo loyamba) mafunde otsika a mm. ma band ndi kuthana ndi mapulogalamu omwe akufunika mphamvu zambiri.Panjira zonse ziwirizi, tapeza zida zoyamba zogwirira ntchito zokhala ndi magwiridwe antchito abwino, ndipo tapeza njira zopititsira patsogolo ma frequency awo. ”
Zida zogwirira ntchito za GaAs/InGaP HBT zomwe zidakula pa 300mm Si zawonetsedwa ngati gawo loyamba lothandizira zida za InP.Chida chopanda chilema chomwe chili pansi pa 3x106cm-2 kusasunthika kwa ulusi chidapezedwa pogwiritsa ntchito njira yapadera ya Imec ya III-V nano-ridge engineering (NRE).Zipangizozi zimagwira ntchito bwino kwambiri kuposa zida zolozera, zokhala ndi ma GaA opangidwa pazigawo za Si zokhala ndi zigawo za strain relaxed buffer (SRB).Mu sitepe yotsatira, zida zapamwamba za InP-based (HBT ndi HEMT) zidzafufuzidwa.
Chithunzi pamwambapa chikuwonetsa njira ya NRE yophatikizira hybrid III-V / CMOS pa 300mm Si: (a) mapangidwe a nano-trench;zofooka zimatsekeredwa m'chigawo chopapatiza cha ngalande;(b) Kukula kwa stack ya HBT pogwiritsa ntchito NRE ndi (c) zosankha zosiyana siyana za kuphatikiza kwa chipangizo cha HBT.
Kuphatikiza apo, zida za CMOS-zogwirizana ndi GaN/AlGaN pa 200mm Si zapangidwa kufanizitsa zida zitatu zosiyanasiyana - HEMTs, MOSFETs ndi MISHEMTs.Zinawonetsedwa kuti zida za MISHEMT zimapambana mitundu ina yazida potengera kusinthasintha kwa chipangizocho komanso magwiridwe antchito aphokoso kuti azigwira ntchito pafupipafupi.Mafupipafupi odulidwa a fT/fmax mozungulira 50/40 adapezedwa kutalika kwa zipata za 300nm, zomwe zikugwirizana ndi zida za GaN-on-SiC zomwe zanenedwa.Kupatula kukulitsa kutalika kwa zipata, zotsatira zoyamba ndi AlInN ngati chotchinga zikuwonetsa kuthekera kopititsa patsogolo magwiridwe antchito, motero, onjezerani ma frequency ogwiritsira ntchito chipangizocho kumagulu ofunikira a mm-wave.
Nthawi yotumiza: 23-03-21